Equipment
eeplasma offers 3 designs of the MW-Remote Plasma Source
Equipment_1
Type: eeRG 2000/3000
Plasma Applicator perpendicular versus MW-launcher
Dimensions: L x W x H; 360 x 360 x 260mm
Equipment_2
Type: eeRG 2000/3000
Plasma Applicator parallel versus MW-launcher
Dimensions: L x W x H; 480 x 300 x 270mm
Equipment_3
Type: eeRG 2000/3000
Plasma Applicator with MW compact-head
Dimensions: L x W x H; 360 x 400 x 300mm
Features of the remote plasma sources:
o Patented design of microwave plasma applicatoro Quartz plasma tube or optional alumina res. sapphire
o Water cooled microwave plasma zone
o Service-friendly exchange of the plasma tube
o Easy tuning of the plasma source after plasma tube- and magnetron exchange
o Plasma ignition within the full pressure range without auxiliary equipment
o Cooling body with ISO-K 63 interface flanges
Specifications:
Type: eeRG 2000/3000
o MW-Power output: max. 2000 / 3000W
o Frequency: 2,45 GHz
o Power input: - 4000V, 750mA / -5000V, 900mA
o Cooling water: min. 3slm / 4slm
o Plasma Chamber: Quartz, Ceramic, Sapphire
o Pressure range: 0,06 – 20 Torr
o Gases: O2, N2, H2, Ar, He, CF4, SF6, Cl2 etc.
o Interface: ISO-K 63 flange